20-nm-Nanogap oxygen gas sensor with solution-processed cerium oxide
نویسندگان
چکیده
Pt-based nanogap electrodes with a gap separation of 20 nm were prepared by electron-beam lithography (EBL). These employed to fabricate gas sensors combining solution-processed cerium oxide (ceria, CeO2) as the sensing material. Two types (bottom- and top-contact) alternating EBL solution process. Oxygen responses investigated functions separation, ceria film thicknesses, operating temperatures. The sensor response strongly depended on nanostructure film. In cases small below 35 nm, exhibits fast time 10 s at relatively low temperature 573 K; this is approximately three orders magnitude shorter than that exhibited microgap under same measurement conditions. could also be in use 1 atm. improved performance attributed extremely electrodes; reduced facilitates electron hopping conduction proposed approach for fabricating robust ultrafine together facile coating method forming layer opens up possibilities develop various time.
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ژورنال
عنوان ژورنال: Sensors and Actuators B-chemical
سال: 2021
ISSN: ['0925-4005', '1873-3077']
DOI: https://doi.org/10.1016/j.snb.2021.130098